Use the Van Zant PDF for fundamentals (oxidation, diffusion, basic lithography). Then pair it with recent papers from IEEE Transactions on Semiconductor Manufacturing for the advanced nodes.
Peter Van Zant's work, as described in his book "Microchip Fabrication," provides a comprehensive overview of the microchip fabrication process. His expertise in the field has helped to educate generations of engineers and technicians, ensuring the continued advancement of this critical technology. microchip fabrication peter van zant pdf work